Stylus Profilometer: An Ultra-Precision Contact Surface Metrology Instrument
Working Principle
The stylus profilometer operates through direct physical contact between a diamond-tipped probe and the sample surface. As the stylus traverses the surface, microscopic peaks and valleys induce vertical displacements, which are converted into electrical signals via sensors. These signals undergo processing through measurement bridges, amplification, phase-sensitive rectification, and filtering to generate a slow-varying output proportional to stylus movement, thereby reconstructing the surface topography.
Instrument Features
1. High Precision
Sub-angstrom vertical resolution (≤0.1 nm)
Measures height variations from micron to nanometer scales
Captures comprehensive data: topography, roughness, waviness
2. Exceptional Stability
High repeatability (σ < 0.5% @ 1μm step)
Reproducible measurements for subtle topographic details
3. User-Friendly Operation
Optional color vision navigation system
Magnetic probe technology for swift tip replacement (<30 sec)
Auto-leveling function and intuitive software with calibration modules
4. Multifunctional Capabilities
Measures step height, film thickness, roughness, stress, etc.
Supports multi-zone and 3D scanning modes
Integrated SPC statistical analysis (e.g., Cp/Cpk calculations)
Application Fields
Semiconductor Industry
Thin-film step height measurement (PVD/CVD layers)
Photoresist profile characterization
Etch rate quantification
CMP (Chemical Mechanical Polishing) monitoring
Photovoltaics
Coating thickness analysis for solar cells
Post-etching step height measurement
Performance optimization of perovskite/CIGS cells
